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This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.

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Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines.

The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include:
- error separation algorithms and systems for measurement of straightness and roundness,
- the measurement of micro-aspherics,
- systems based on scanning probe microscopy, and
- scanning image-sensor systems.

Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

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Angle Sensor for Measurement of Surface Slope and Tilt Motion.- Laser Autocollimator for Measurement of Multi-axis Tilt Motion.- Surface Encoder for Measurement of In-plane Motion.- Grating Encoder for Measurement of In-plane and Out-of-plane Motion.- Scanning Multi-probe System for Measurement of Roundness.- Scanning Error Separation System for Measurement of Straightness.- Scanning Micro-stylus System for Measurement of Micro-aspherics.- Large Area Scanning Probe Microscope for Micro-textured Surfaces.- Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures.- Scanning Image-sensor System for Measurement of Micro-dimensions.

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