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PART I. FUNDAMENTALS
Fundamental Theory of Resonant MEMS Devices
Frequency Response of Cantilever Beams Immersed in Viscous Fluids
Damping in Resonant MEMS
Parametrically-Excited Micro- and Nanosystems
Finite Element Modeling of Resonators
PART II. IMPLEMENTATION
Capacitive Devices
Piezoelectric Resonant MEMS
Resonant MEMS Electrothermal Excitation
Nanoelectromechanical Systems (NEMS)
Organic Resonant MEMS Devices
Devices with Embedded Channels
Hermetic Packaging for Resonant MEMS
Compensation, Tuning and Trimming of MEMS Resonators
PART III. APPLICATIONS
MEMS Inertial Sensors
Resonant MEMS Chemical Sensors
Biosensors
Fluid Properties Sensors
Energy Harvesting Devices

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A must-have for any MEMS R&D group: for the first time vital and hard-to-come-by knowledge is combined in one ready reference. From the principles and implementations, the book presents a unified view of resonant MEMS and their applications rather than unrelated case studies.

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Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

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