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This book contains a comprehensive review of the physics, modelling and simulation of electron transport at interfaces in semiconductor devices. It combines a review of existing interface charge transport models with original developments, and introduces a unified representation of charge transport at semiconductor interfaces.

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1 Introduction.- 2 Charge Transport in the Volume.- 3 General Electronic Model of the Interface.- 4 Charge Transport Across the Interface.- 5 Semiconductor-Insulator Interface.- 6 Metal-Semiconductor Contact.- 7 Semiconductor Heterojunction.- 8 MOSFET Gate.- 9 Discretization.- Appendices.- A Transformation of k-Vectors.- B Conservation of Transverse Momentum.- D Approximation of Surface Mobility.- Bibliography 209 Index.

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The book contains a comprehensive review of the physics, modelling and simulation of electron transport at interfaces in semiconductor devices. Particular emphasis is put on boundary conditions for semiconductor device simulation. Models for important interfaces are derived within a unified modelling framework of interface charge transport and discussed in the context of device simulation.

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