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This PhD thesis describes the realization of integrated optical components in Silicon-on-Insulator (SOI) material. In particular, the thesis is focused on the realization of Mach-Zehnder delay interferometers (MZ-DI) in 4µm SOI technology. As an example, the ability of MZ-DI for the demodulation of phase-modulated data signals is investigated. The thesis considers in detail the design of the basic components for the realization of MZ-DIs in SOI technology. These components are single-mode waveguides and multi-mode interference (MMI) couplers. Following simulations and iterations of the fabrication, these components can be realized with high-performance. Based on these components, the performance of the MZ-DIs is investigated. Typical extinction ratios are in the range of 30 dB. The polarization-dependent frequency shift (PDFS) is reduced to about 0.2 GHz. Furthermore, the hybrid integration of active InP components on SOI platform is shown. Based on flip-chip technology, this includes the realization of an integrated optical DPSK receiver and an integrated all-optical wavelength converter.

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Karsten Voigt received his M.A. degree in physics and philosophy in 2005 at the Technische Universität Berlin. During his PhD he performed research in the field of Silicon Photonics. In 2012 he pursued his PhD degree under supervision of Prof. K. Petermann.

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