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The use of control and control systems are an essential part of functioning integrated systems. Feedback Control Systems for Micro- and Nano-Scales shows how feedback control in nanotechnology instrumentation can yield results better than passive systems can.

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Control from MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated systems. The book is organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems. Similar to macro-scale machines and processes, control systems can play a major role in improving the performance of micro- and nano-scale systems and in enabling new capabilities that would otherwise not be possible. However, the majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry.

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Introduction.- FeedbackControl of Particle Size Distribution in Nanoparticle Synthesis andProcessing.- In situ optical sensingand state estimation in crystal growth.- Autonomous tip based 2-D mechanicalassembly of micro/nano-particles.- Atomic Force Microscopy: Principles andsystems viewpoint enabled methods.- Controlled Optical Trapping:Instrumentation, Methods, and Applications.- Control ofMEMS.- Tuned Vibratory Rate Sensors.- FeedbackControl of Micro-Flows for Liquid Shape and Particle Manipulation.- Problems in Control of Quantum Systems.- CommonThreads and Future Directions.

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