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This book describes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. It also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics.

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Advanced Mechatronics and MEMS Devices describes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.

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Development of a Silicon Based MEMS6-DoF-Force/Torque-Sensor.- Piezoelectrically Actuated Robotic End-effector with Strain Amplification Mechanisms.- Autocalibration of MEMS Accelerometers.- Miniaturization of Micromanipulation Tools.- Digital Microrobotics Using MEMS Technology.- Flexure-based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches.- Micro-Tactile Sensors for Measurement of In-Vivo Young´s Modulus and Shear Modulus of Elasticity.- Devices and techniques for micro-gripping.- A Wall-climbing Robot with Biomimetic Adhesive Pedrail.- Development of Bio-inspired Artificial Sensory Cilia.- Jumping Like an Insect: from Bio-mimetic Inspiration to a Jumping Mini Robot Design.- Modeling and H_ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator (EHA) System.

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